TY - CPAPER
AU - Jorge Charpak
AU - Travis Frazer
AU - Joshua Knobloch
AU - Kathleen Hoogeboom-Pot
AU - Damiano Nardi
AU - Weilun Chao
AU - Lei Jiang
AU - Marie Tripp
AU - Sean King
AU - Henry Kapteyn
AU - Margaret Murnane
BT - unknown
CY - San Jose, California, United States
DA - 2016-01
DO - 10.1117/12.2219434
PB - SPIE
PP - San Jose, California, United States
PY - 2016
T2 - unknown
TI - Reliable characterization of materials and nanostructured systems <<50nm using coherent EUV beams
UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2219434
ER -