@conference{3878,
  author = {Jorge Charpak and Travis Frazer and Joshua Knobloch and Kathleen Hoogeboom-Pot and Damiano Nardi and Weilun Chao and Lei Jiang and Marie Tripp and Sean King and Henry Kapteyn and Margaret Murnane},
  title = {Reliable characterization of materials and nanostructured systems <<50nm using coherent EUV beams},
  year = {2016},
  journal = {unknown},
  month = {2016-01},
  publisher = {SPIE},
  address = {San Jose, California, United States},
  url = {http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2219434},
  doi = {10.1117/12.2219434},
}