The fabrication of through-wafer interconnects in silicon substrates for ultra-high-vacuum atom-optics cells
| Author | |
|---|---|
| Year of Publication |
2008
|
| Date Published |
2008-04
|
| Journal Title |
Journal of Micromechanics and Microengineering
|
| Volume |
18
|
| Start Page or Article ID |
045003
|
| ISSN Number |
0960-1317
|
| DOI | |
| Download citation | |
| JILA PI | |
| Associated Institutes | |
Journal Article
|
|
| Publication Status |