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Tabletop Extreme Ultraviolet Reflectometer for Quantitative Nanoscale Reflectometry, Scatterometry, and Imaging
Author
Yuka Esashi
Nicholas Jenkins
Y. Shao
Justin Shaw
S. Park
Margaret Murnane
Henry Kapteyn
Michael Tanksalvala
Year of Publication
2023
Journal Title
Review of Scientific Instruments (In Press)
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JILA PI
Margaret Murnane
Henry Kapteyn
Journal Article
JILA Topics
Laser Physics
Publication Status
In Press
and 
and
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