Coherent Fourier scatterometry using orbital angular momentum beams for defect detection
| Author | |
|---|---|
| Year of Publication |
2021
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| Date Published |
2021-01
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| Journal Title |
Optics Express
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| Volume |
29
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| Issue |
3
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| Start Page or Article ID |
3342
|
| Start Page or Article ID (old) |
3342-3358
|
| ISSN Number |
1094-4087
|
| DOI | |
| URL | |
| Download citation | |
| JILA PI | |
Journal Article
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| JILA Topics | |
| Publication Status |