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Plasma Chemistry in Silane and Silane-Germane Discharge Deposition
Author
Alan Gallagher
John Doyle
D. Doughty
Year of Publication
1989
Date Published
Jan-01-1989
Journal Title
MRS Proceedings
Volume
149
DOI
10.1557/PROC-149-23
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published