Surface reaction probability of film-producing radicals in silane glow discharges
| Author | |
|---|---|
| Year of Publication |
1990
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| Date Published |
Jan-01-1990
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| Journal Title |
Journal of Applied Physics
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| Volume |
67
|
| Start Page or Article ID |
6220
|
| ISSN Number |
00218979
|
| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
|
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| Publication Status |