Sub-wavelength transmission and reflection mode tabletop imaging with 13nm illumination via ptychography CDI

Author
Year of Publication
2017
Conference Name
unknown
Date Published
2017-01
Publisher
SPIE
Conference Location
San Jose, California, United States
URL
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2271386
DOI
10.1117/12.2271386