First Demonstration of Sub-Wavelength Imaging at Short Wavelengths

Author
Abstract
<p>By combining tabletop 13.5nm high-harmonic EUV beams with novel ptychography reconstruction algorithms, we demonstrate diffraction-limit high-NA and sub-wavelength resolution imaging at EUV wavelengths for the first time, representing a record resolution for full-field lightbased microscopy</p>
Year of Publication
2017
Conference Name
unknown
Date Published
2017-09
URL
https://www.osapublishing.org/abstract.cfm?URI=LS-2017-LM3F.4
DOI
10.1364/LS.2017.LM3F.4