A new metrology technique for defect inspection via coherent Fourier scatterometry using orbital angular momentum beams | JILA

Author	Bin Wang Michael Tanksalvala Zhe Zhang Yuka Esashi Nicholas Jenkins Margaret Murnane Henry Kapteyn Chen-Ting Liao
Keywords	scatterometry defect inspection coherent Fourier scatterometry orbital angular momentum OAM
Abstract
Year of Conference	2021
Conference Name	Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
Volume	11611
Start Page or Article ID	76-90
Date Published	2021-02
Publisher	SPIE
URL	https://doi.org/10.1117/12.2584728
DOI	10.1117/12.2584728
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Publication Status	Published
Associated Institutes	STROBE
JILA PI	Margaret Murnane Henry Kapteyn
JILA Topics	Laser Physics
Group Name & Research Topics	K-M Group
	Conference Proceedings