Full characterization of ultrathin 5-nm low-k dielectric bilayers: Influence of dopants and surfaces on the mechanical properties
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| Abstract |
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| Year of Publication |
2020
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| Date Published |
2020-07
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| Journal Title |
Phys. Rev. Materials
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| Volume |
4
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| Start Page or Article ID |
073603
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| Start Page or Article ID (old) |
073603
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| Associated Institutes | |
Journal Article
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