Quantitative tabletop coherent diffraction imaging microscope for EUV lithography mask inspection | JILA

Author	Bosheng Zhang D. Adams Matthew Seaberg Dennis Gardner Elisabeth Shanblatt Henry Kapteyn Margaret Murnane
Year of Publication	2014
Conference Name	unknown
Date Published	2014-01
Publisher	SPIE
Conference Location	San Jose, California, USA
URL	http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2046526
DOI	10.1117/12.2046526
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JILA PI	Henry Kapteyn Margaret Murnane
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