Nanoscale EUV Microscopy on a Tabletop: A General Transmission and Reflection Mode Microscope Based on Coherent Diffractive Imaging with High Harmonic Illumination

<p>A new scientic frontier exists at the intersection of the nanoscale and the ultrafast. In order\&nbsp;<span style="font-size: 13px; line-height: 1.6em;">to explore this frontier, new tools with unique capabilities for imaging with nanometer spatial and\&nbsp;</span><span style="font-size: 13px; line-height: 1.6em;">femtosecond temporal resolution are critical. This thesis describes the development of such a tool,\&nbsp;</span><span style="font-size: 13px; line-height: 1.6em;">combining coherent diffractive imaging (CDI) with an extreme ultraviolet (EUV) high harmonic\&nbsp;</span><span style="font-size: 13px; line-height: 1.6em;">generation (HHG) light source to produce a compact, accessible, high-resolution microscope. Here,\&nbsp;</span><span style="font-size: 13px; line-height: 1.6em;">this microscope is used to demonstrate 22 nm resolution in transmission, a record for any full-field\&nbsp;</span><span style="font-size: 13px; line-height: 1.6em;">tabletop light-based microscope. Further, this microscope is used to demonstrate the most general\&nbsp;</span><span style="font-size: 13px; line-height: 1.6em;">refl</span><span style="font-size: 13px; line-height: 1.6em;">ection mode implementation of CDI to date, enabling image reconstruction at any angle of\&nbsp;</span><span style="font-size: 13px; line-height: 1.6em;">incidence.</span></p>