Nanoscale EUV Microscopy on a Tabletop: A General Transmission and Reflection Mode Microscope Based on Coherent Diffractive Imaging with High Harmonic Illumination
Author | |
Abstract |
<p>A new scientic frontier exists at the intersection of the nanoscale and the ultrafast. In order\ <span style="font-size: 13px; line-height: 1.6em;">to explore this frontier, new tools with unique capabilities for imaging with nanometer spatial and\ </span><span style="font-size: 13px; line-height: 1.6em;">femtosecond temporal resolution are critical. This thesis describes the development of such a tool,\ </span><span style="font-size: 13px; line-height: 1.6em;">combining coherent diffractive imaging (CDI) with an extreme ultraviolet (EUV) high harmonic\ </span><span style="font-size: 13px; line-height: 1.6em;">generation (HHG) light source to produce a compact, accessible, high-resolution microscope. Here,\ </span><span style="font-size: 13px; line-height: 1.6em;">this microscope is used to demonstrate 22 nm resolution in transmission, a record for any full-field\ </span><span style="font-size: 13px; line-height: 1.6em;">tabletop light-based microscope. Further, this microscope is used to demonstrate the most general\ </span><span style="font-size: 13px; line-height: 1.6em;">refl</span><span style="font-size: 13px; line-height: 1.6em;">ection mode implementation of CDI to date, enabling image reconstruction at any angle of\ </span><span style="font-size: 13px; line-height: 1.6em;">incidence.</span></p>
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Year of Publication |
2014
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Degree |
Ph.D.
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Number of Pages |
192
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Date Published |
2014-10
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University |
University of Colorado Boulder
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City |
Boulder
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JILA PI Advisors | |
SeabergThesis.pdf22.74 MB
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Publication Status |