Reflection Mode Imaging with Extreme-Ultraviolet Light from a High Harmonic Source

To date there have been few demonstrations of reflection-geometry coherent diffractive imaging (CDI). The work described here, using a high-harmonic source at 30nm, is the first general reflection mode technique. We use a combination of ptychography and tilted plane correction to image an extended sample with no restriction on the incident angle or limitations on the numerical aperture. We find good agreement between our CDI images and images from scanning electron microscopy and atomic force microscopy.