Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography | JILA

Author	Fabian Holzmeier Kevin Dorney Esben Larsen Thomas Nuytten Dhirendra Singh Michiel van Setten Pieter Vanelderen Clayton Bargsten Seth Cousin Daisy Raymondson Eric Rinard Rod Ward Henry Kapteyn Stefan Böttcher Oleksiy Dyachenko Raimund Kremzow Marko Wietstruk Geoffrey Pourtois Paul van der Heide John Petersen Eric Panning Alexander Liddle
Abstract
Year of Conference	2021
Conference Name	Novel Patterning Technologies 2021
Volume	11610
Start Page or Article ID	1161010
Date Published	2021-02
Publisher	SPIE
ISBN Number	9781510640535
DOI	10.1117/12.2595038
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Publication Status	Published
JILA PI	Henry Kapteyn
JILA Topics	Laser Physics
Group Name & Research Topics	K-M Group
	Conference Proceedings