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Generation of a velocity selected, pulsed source of hyperthermal (1–10 eV) neutral metal atoms for thin film growth studies

TitleGeneration of a velocity selected, pulsed source of hyperthermal (1–10 eV) neutral metal atoms for thin film growth studies
Publication TypeJournal Article
Year of Publication1997
AuthorsKnowles, MP, Leone, SR
JournalJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume15
Issue5
Pagination2709
Date PublishedJan-09-1997
ISSN07342101
DOI10.1116/1.580945
Short TitleJ. Vac. Sci. Technol. A