Spectroscopic imaging of buried layers in 2+1D via tabletop ptychography with high-harmonic EUV illumination

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Year of Publication
2016
Conference Name
unknown
Date Published
2016-01
Publisher
SPIE
Conference Location
San Jose, California, United States
URL
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2220368
DOI
10.1117/12.2220368
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