Mechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams

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Year of Publication
2015
Conference Name
unknown
Date Published
2015-01
Publisher
SPIE
Conference Location
San Jose, California, United States
URL
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2085615
DOI
10.1117/12.2085615
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