Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source
| Author | |
| Year of Publication |
2012
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| Conference Name |
SPIE
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| Date Published |
2012-01
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| Publisher |
SPIE
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| Conference Location |
San Jose, California
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| URL |
http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1311014
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| DOI |
10.1117/12.916524
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