Facebook Twitter Instagram YouTube

Surface Reactions in Discharge and Cvd Deposition of Silane

TitleSurface Reactions in Discharge and Cvd Deposition of Silane
Publication TypeJournal Article
Year of Publication1986
AuthorsGallagher, AC
JournalMRS Proceedings
Volume70
Pagination3-10
Date Published1986-01
DOI10.1557/PROC-70-3
Short TitleMRS Proc.