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Surface reaction probability of film-producing radicals in silane glow discharges

TitleSurface reaction probability of film-producing radicals in silane glow discharges
Publication TypeJournal Article
Year of Publication1990
AuthorsDoughty, DA, Doyle, JR, Lin, G-H, Gallagher, AC
JournalJournal of Applied Physics
Volume67
Issue10
Pagination6220
Date PublishedJan-01-1990
ISSN00218979
DOI10.1063/1.345188
Short TitleJ. Appl. Phys.

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