Facebook Twitter Instagram YouTube

Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 Å/s

TitleSaturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 Å/s
Publication TypeJournal Article
Year of Publication2001
AuthorsMahan, AH, Xu, Y, Nelson, BP, Crandall, RS, Cohen, JD, Palinginis, KC, Gallagher, AC
JournalApplied Physics Letters
Volume78
Issue24
Pagination3788
Date PublishedJan-01-2001
ISSN00036951
DOI10.1063/1.1375008
Short TitleAppl. Phys. Lett.