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Radical species in argon-silane discharges

TitleRadical species in argon-silane discharges
Publication TypeJournal Article
Year of Publication1983
AuthorsRobertson, RM, Hils, D, Chatham, H, Gallagher, AC
JournalApplied Physics Letters
Volume43
Issue6
Pagination544
Date PublishedJan-01-1983
ISSN00036951
DOI10.1063/1.94413
Short TitleAppl. Phys. Lett.