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Plasma chemistry in silane/germane and disilane/germane mixtures

TitlePlasma chemistry in silane/germane and disilane/germane mixtures
Publication TypeJournal Article
Year of Publication1992
AuthorsDoyle, JR, Doughty, DA, Gallagher, AC
JournalJournal of Applied Physics
Volume71
Issue10
Pagination4727
Date PublishedJan-01-1992
ISSN00218979
DOI10.1063/1.350663
Short TitleJ. Appl. Phys.