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Plasma Chemistry in Silane and Silane-Germane Discharge Deposition

TitlePlasma Chemistry in Silane and Silane-Germane Discharge Deposition
Publication TypeJournal Article
Year of Publication1989
AuthorsGallagher, AC, Doyle, JR, Doughty, DA
JournalMRS Proceedings
Volume149
Date PublishedJan-01-1989
DOI10.1557/PROC-149-23
Short TitleMRS Proc.