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Particle accumulation in a flowing silane discharge

TitleParticle accumulation in a flowing silane discharge
Publication TypeJournal Article
Year of Publication1997
AuthorsJelenković, BM, Gallagher, AC
JournalJournal of Applied Physics
Volume82
Issue4
Pagination1546
Date PublishedJan-01-1997
ISSN00218979
DOI10.1063/1.365955
Short TitleJ. Appl. Phys.