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Chemical vapor deposition of nanometer-size aluminum features on silicon surfaces using an STM tip

TitleChemical vapor deposition of nanometer-size aluminum features on silicon surfaces using an STM tip
Publication TypeJournal Article
Year of Publication1996
AuthorsLaracuente, AL, Bronikowski, MJ, Gallagher, AC
JournalApplied Surface Science
Volume107
Pagination11 - 17
Date PublishedJan-11-1996
ISSN01694332
DOI10.1016/S0169-4332(96)00514-4
Short TitleApplied Surface Science