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Chemical mapping of patterned polymer photoresists by near-field infrared microscopy

TitleChemical mapping of patterned polymer photoresists by near-field infrared microscopy
Publication TypeJournal Article
Year of Publication2001
AuthorsDragnea, B, Preusser, J, Szarko, JM, McDonough, LA, Leone, SR, Hinsberg, WD
JournalApplied Surface Science
Volume175-176
Pagination783 - 789
Date PublishedJan-05-2001
ISSN01694332
DOI10.1016/S0169-4332(01)00068-X
Short TitleApplied Surface Science