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Cavity Optomechanics with Stoichiometric SiN Films

TitleCavity Optomechanics with Stoichiometric SiN Films
Publication TypeJournal Article
Year of Publication2009
AuthorsWilson, D, Regal, CA, Papp, SB, Kimble, HJ
JournalPhysical Review Letters
Volume103
Date Published11/2009
ISSN0031-9007
DOI10.1103/PhysRevLett.103.207204

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