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Multiple beam ptychography

TitleMultiple beam ptychography
Publication TypeConference Paper
Year of Publication2016
AuthorsKarl, RM, Bevis, C, Lopez-Rios, R, Reichanadter, J, Gardner, DF, Porter, C, Shanblatt, E, Tanksalvala, M, Mancini, GF, Murnane, MM, Kapteyn, HC, Adams, DE
EditorSanchez, MI, Ukraintsev, VA
Conference NameSPIE Advanced LithographyMetrology, Inspection, and Process Control for Microlithography XXX, SPIE Proceedings
PublisherSPIE
Conference LocationSan Jose, California, United States
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2220416
DOI10.1117/12.2220416