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Mechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams

TitleMechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams
Publication TypeConference Paper
Year of Publication2015
AuthorsHoogeboom-Pot, KM, Hernandez-Charpak, J, Frazer, T, Gu, X, Turgut, E, Anderson, EH, Chao, W, Shaw, JM, Yang, R, Murnane, MM, Kapteyn, HC, Nardi, D
EditorCain, JP, Sanchez, MI
Conference NameProceedings, SPIE Advanced LithographyMetrology, Inspection, and Process Control for Microlithography XXIX
PublisherSPIE
Conference LocationSan Jose, California, United States
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2085615
DOI10.1117/12.2085615