Facebook Twitter Instagram YouTube

The fabrication of through-wafer interconnects in silicon substrates for ultra-high-vacuum atom-optics cells

TitleThe fabrication of through-wafer interconnects in silicon substrates for ultra-high-vacuum atom-optics cells
Publication TypeJournal Article
Year of Publication2008
AuthorsChuang, H-C, Anderson, DZ, Bright, VM
JournalJournal of Micromechanics and Microengineering
Volume18
Pagination045003
Date Published04/2008
ISSN0960-1317
Keywordspfc
DOI10.1088/0960-1317/18/4/045003