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Lensless hyperspectral spectromicroscopy with a tabletop extreme-ultraviolet source

TitleLensless hyperspectral spectromicroscopy with a tabletop extreme-ultraviolet source
Publication TypeConference Paper
Year of Publication2016
AuthorsGardner, DF, Zhang, B, Seaberg, MH, Shanblatt, ER, Porter, CL, Karl, RM, Mancuso, C, Kapteyn, HC, Murnane, MM, Adams, DE
EditorSanchez, MI, Ukraintsev, VA
Conference NameSPIE Advanced LithographyMetrology, Inspection, and Process Control for Microlithography XXX, SPIE Proceedings
PublisherSPIE
Conference LocationSan Jose, California, United States
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2220711
DOI10.1117/12.2220711