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Spectroscopic imaging of buried layers in 2+1D via tabletop ptychography with high-harmonic EUV illumination

TitleSpectroscopic imaging of buried layers in 2+1D via tabletop ptychography with high-harmonic EUV illumination
Publication TypeConference Paper
Year of Publication2016
AuthorsGardner, DF, Porter, CL, Shanblatt, ER, Mancini, GF, Karl, RM, Tanksalvala, M, Bevis, CS, Kapteyn, HC, Murnane, MM, Adams, DE
EditorSanchez, MI, Ukraintsev, VA
Conference NameSPIE Advanced LithographyMetrology, Inspection, and Process Control for Microlithography XXX, SPIE Proceedings
PublisherSPIE
Conference LocationSan Jose, California, United States
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2220368
DOI10.1117/12.2220368

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