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High contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography

TitleHigh contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography
Publication TypeJournal Article
Year of Publication2015
AuthorsZhang, B, Gardner, DF, Seaberg, MD, Shanblatt, ER, Kapteyn, HC, Murnane, MM, Adams, DE
JournalUltramicroscopy
Volume158
Pagination98 - 104
Date PublishedJan-11-2015
ISSN03043991
URLhttp://linkinghub.elsevier.com/retrieve/pii/S0304399115300115
DOI10.1016/j.ultramic.2015.07.006
Short TitleUltramicroscopy

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