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SPIE Proceedings: Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source

TitleSPIE Proceedings: Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source
Publication TypeConference Paper
Year of Publication2012
AuthorsSeaberg, MD, Adams, DE, Zhang, B, Gardner, DF, Murnane, MM, Kapteyn, HC
EditorStarikov, A
Conference NameSPIE Advanced LithographyMetrology, Inspection, and Process Control for Microlithography XXVI
PublisherSPIE
Conference LocationSan Jose, California
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1311014
DOI10.1117/12.916524