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Tabletop coherent diffractive microscopy with extreme ultraviolet light from high harmonic generation

TitleTabletop coherent diffractive microscopy with extreme ultraviolet light from high harmonic generation
Publication TypeConference Paper
Year of Publication2009
AuthorsRaymondson, DA, Sandberg, RL, Schlotter, WF, Raines, KS, La-O-Vorakiat, C, Townsend, E, Sakdinawat, AE, Paul, AJ, Miao, J, Murnane, MM, Kapteyn, HC
EditorAllgair, JA, Raymond, CJ
Conference NameSPIE Proceedings: Advanced Lithography, Metrology, Inspection, and Process Control for Microlithography XXIII
PublisherSPIE
Conference LocationSan Jose, CA
URLhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=817538
DOI10.1117/12.814313

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