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Laser probing of gallium atom interactions with silicon(100) surfaces

TitleLaser probing of gallium atom interactions with silicon(100) surfaces
Publication TypeJournal Article
Year of Publication1987
AuthorsCarleton, KL, Leone, SR
JournalJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume5
Issue4
Pagination1141
Date PublishedJan-07-1987
ISSN0734211X
DOI10.1116/1.583743
Short TitleJ. Vac. Sci. Technol. B