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Laser-Induced Desorption of in and Ga from Si(100) and Adsorbate Enhanced Surface Damage

TitleLaser-Induced Desorption of in and Ga from Si(100) and Adsorbate Enhanced Surface Damage
Publication TypeJournal Article
Year of Publication1991
AuthorsStrupp, PG, Alstrin, AL, Korte, BJ, Leone, SR
JournalMRS Proceedings
Volume236
Date PublishedJan-01-1991
DOI10.1557/PROC-236-27
Short TitleMRS Proc.