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Scattering of Cl2 beams from Si(100) for kinetic energies up to 2.6 eV: implications for sticking coefficients and reaction product formation

TitleScattering of Cl2 beams from Si(100) for kinetic energies up to 2.6 eV: implications for sticking coefficients and reaction product formation
Publication TypeJournal Article
Year of Publication1995
AuthorsWeaver, GC, Leone, SR
JournalSurface Science
Volume328
Issue3
Pagination197 - 214
Date PublishedJan-05-1995
ISSN00396028
DOI10.1016/0039-6028(95)00035-6
Short TitleSurface Science