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Atomic force microscopy study of the growth and annealing of Ge islands on Si(100)

TitleAtomic force microscopy study of the growth and annealing of Ge islands on Si(100)
Publication TypeJournal Article
Year of Publication2002
AuthorsLiu, B, Berrie, CL, Kitajima, T, Bright, J, Leone, SR
JournalJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume20
Issue2
Pagination678
Date PublishedJan-01-2002
ISSN0734211X
DOI10.1116/1.1459724
Short TitleJ. Vac. Sci. Technol. B