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Reaction mechanism and kinetics of silane pyrolysis on a hydrogenated amorphous silicon surface

TitleReaction mechanism and kinetics of silane pyrolysis on a hydrogenated amorphous silicon surface
Publication TypeJournal Article
Year of Publication1986
AuthorsRobertson, RM, Gallagher, AC
JournalThe Journal of Chemical Physics
Volume85
Issue6
Pagination3623
Date PublishedJan-01-1986
ISSN00219606
DOI10.1063/1.450933
Short TitleJ. Chem. Phys.