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Surface Reactions in Discharge and Cvd Deposition of Silane

TitleSurface Reactions in Discharge and Cvd Deposition of Silane
Publication TypeJournal Article
Year of Publication1986
AuthorsGallagher, AC
JournalMRS Proceedings
Volume70
Pagination3-10
Date Published1986-01
DOI10.1557/PROC-70-3
Short TitleMRS Proc.

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