Facebook Twitter Instagram YouTube

Neutral radical deposition from silane discharges

TitleNeutral radical deposition from silane discharges
Publication TypeJournal Article
Year of Publication1988
AuthorsGallagher, AC
JournalJournal of Applied Physics
Volume63
Issue7
Pagination2406
Date PublishedJan-01-1988
ISSN00218979
DOI10.1063/1.341034
Short TitleJ. Appl. Phys.