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Neutral radical deposition from silane discharges

TitleNeutral radical deposition from silane discharges
Publication TypeJournal Article
Year of Publication1988
AuthorsGallagher, AC
JournalJournal of Applied Physics
Volume63
Issue7
Pagination2406
Date PublishedJan-01-1988
ISSN00218979
DOI10.1063/1.341034
Short TitleJ. Appl. Phys.

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