Facebook Twitter Instagram YouTube

Production of high-quality amorphous silicon films by evaporative silane surface decomposition

TitleProduction of high-quality amorphous silicon films by evaporative silane surface decomposition
Publication TypeJournal Article
Year of Publication1988
AuthorsDoyle, JR, Robertson, RM, Lin, G-H, He, MZ, Gallagher, AC
JournalJournal of Applied Physics
Volume64
Issue6
Pagination3215
Date PublishedJan-01-1988
ISSN00218979
DOI10.1063/1.341539
Short TitleJ. Appl. Phys.