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Deposition rates in direct current diode sputtering

TitleDeposition rates in direct current diode sputtering
Publication TypeJournal Article
Year of Publication1993
AuthorsStutzin, GC, Rozsa, K, Gallagher, AC
JournalJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume11
Issue3
Pagination647
Date PublishedJan-05-1993
ISSN07342101
DOI10.1116/1.578786
Short TitleJ. Vac. Sci. Technol. A