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Factors Influencing the Quality of a-Si:H Films Deposited by the “HOT WIRE” Technique

TitleFactors Influencing the Quality of a-Si:H Films Deposited by the “HOT WIRE” Technique
Publication TypeJournal Article
Year of Publication1994
AuthorsMolenbroek, EC, Mahan, AH, Johnson, EJ, Gallagher, AC
JournalMRS Proceedings
Volume336
Date PublishedJan-01-1994
DOI10.1557/PROC-336-43
Short TitleMRS Proc.