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Anion reactions in silane plasma

TitleAnion reactions in silane plasma
Publication TypeJournal Article
Year of Publication2002
AuthorsGallagher, AC, Howling, AA, Hollenstein, C
JournalJournal of Applied Physics
Volume91
Issue9
Pagination5571
Date PublishedJan-01-2002
ISSN00218979
DOI10.1063/1.1459758
Short TitleJ. Appl. Phys.