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The role of higher silanes in silane-discharge particle growth

TitleThe role of higher silanes in silane-discharge particle growth
Publication TypeJournal Article
Year of Publication2005
AuthorsBano, G, Horvath, P, Rozsa, K, Gallagher, AC
JournalJournal of Applied Physics
Volume98
Issue1
Pagination013304
Date PublishedJan-01-2005
ISSN00218979
DOI10.1063/1.1947895
Short TitleJ. Appl. Phys.