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A common-path heterodyne interferometer for surface profiling in microelectronic fabrication

TitleA common-path heterodyne interferometer for surface profiling in microelectronic fabrication
Publication TypeJournal Article
Year of Publication2001
AuthorsKlein, EJ, W. Ramirez, F, Hall, JL
JournalReview of Scientific Instruments
Volume72
Issue5
Pagination2455
Date PublishedJan-01-2001
ISSN00346748
DOI10.1063/1.1367353
Short TitleRev. Sci. Instrum.